China begins mass production of homegrown immersion chipmaking machines in major breakthrough, report claims — first DUV lithography units will be delivered this year to SMIC, Hua Hong, and CXMT
When you purchase through links on our site, we may earn an affiliate commission. SMIC has been testing a Yuliangsheng immersion tool since September 2025. Most components in the new systems are domestic, though some critical parts still come from Japan, and delays at local suppliers have held back output this year.U.S.
- ▪When you purchase through links on our site, we may earn an affiliate commission.
- ▪SMIC has been testing a Yuliangsheng immersion tool since September 2025.
- ▪Most components in the new systems are domestic, though some critical parts still come from Japan, and delays at local suppliers have held back output this year.U.S.
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| Original publisher | Tom's Hardware |
| Canonical URL | https://www.tomshardware.com/tech-industry/semiconductors/china-begins-mass-production-of-domestic-immersion-duv-lithography-machines |
| Publication time | Mon, 27 Jul 2026 16:51:35 +0000 |
| Retrieval time | 2026-07-27T16:56:30.259Z |
| Last seen | 2026-07-27T16:56:39.696Z |
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Tech Industry Manufacturing Semiconductors China begins mass production of homegrown immersion chipmaking machines in major breakthrough, report claims — first DUV lithography units will be delivered this year to SMIC, Hua Hong, and CXMT News By Luke James Published 27 July 2026 Roughly five machines this year and 20 in 2027. When you purchase through links on our site, we may earn an affiliate commission. Here’s how it works. (Image credit: SMIC) Copy link Facebook X Whatsapp Reddit Pinterest Flipboard Email Share this article 0 Join the conversation Follow us Add us as a preferred source on Google Newsletter Subscribe to our newsletter A state-backed company in Shanghai has begun mass-producing immersion deep ultraviolet lithography machines and is due to deliver the first units this…
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