ASML's roadmap for chipmaking lithography tools examined — from DUV to Low-NA, High-NA, Hyper-NA, and beyond
ASML, the dominant supplier of semiconductor lithography equipment, continues to advance its technology roadmap from DUV and low-NA EUV systems to High-NA and future Hyper-NA platforms, supporting the industry's push for smaller transistors. The company shipped 48 EUV and 131 DUV tools in 2025, maintaining a monopoly in EUV lithography and holding a significant share of the global market. Each new generation of lithography tool offers improved resolution but comes with higher costs and complexity, influencing how quickly major chipmakers like Intel, Samsung, and TSMC can scale their processes.
- ▪ASML shipped 48 EUV and 131 immersion DUV lithography tools in 2025, generating €32.7 billion in revenue with a €38.8 billion order backlog.
- ▪ASML holds a 100% monopoly on EUV lithography and approximately 83% of the global lithography market.
- ▪Low-NA EUV systems like the NXE:3800E cost around $180 million and achieve throughputs of up to 230 wafers per hour.
- ▪High-NA EUV tools are entering early production at Intel and Samsung, while Hyper-NA remains in feasibility studies for the 2030s.
- ▪Chinese customers bought an estimated 70% of ASML's DUV immersion systems in 2024 before export restrictions expanded.
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Tech Industry Manufacturing Semiconductors ASML's roadmap for chipmaking lithography tools examined — from DUV to Low-NA, High-NA, Hyper-NA, and beyond MEMBER EXCLUSIVE Features By Luke James published 1 May 2026 The machines that print every advanced chip are becoming larger, more expensive, and increasingly difficult to build. When you purchase through links on our site, we may earn an affiliate commission. Here’s how it works. (Image credit: ASML) Share Copy link Facebook X Whatsapp Reddit Pinterest Flipboard Email Share this article Join the conversation Follow us Add us as a preferred source on Google Newsletter Subscribe to our newsletter ASML shipped 48 EUV lithography systems and 131 immersion DUV tools in 2025, generating €32.7 billion in total revenue and ending the year with a…
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